Wafer Manufacturing

The quality of the silicium wafer substrate is crucial for the performance of the integrated circuit chip manufactured from it.

Power consumption as well as electrical properties of the circuits are dependant on the purity of the silicium wafer. Wafers are manufactured and processed in a chain of complex steps before they are - being thoroughly tested - supplied to front end semiconductor manufacturing.

Air and media contamination that can change the electrical properties of the wafer are to be excluded from any contact with the substrate during its production. To assure this even small emissions of harmful compounds from building materials or outgassing from processing residues have to be removed from air.

artemis control has developped concepts and products to assess, measure and prevent the impact of trace contamination to wafer substrates, in its production, storage, transport and injection into the chip manufacturing chain.

We provide our customers with specialized and locally adapted solutions for new production lines and equipment as well as for the upgrading of existing lines.