Microelectronic components based on semiconductors are produced in a complex and multistage chain of repetitive manufacturing steps.

In the production plants of leading semiconductor manufacturers the pure silicium substrates or silicium substrates with insulating layer are introduced into a non-stop running, automated production process. Powerful processors, memory units, wireless chips as well as image receiving or reproducing units are created in many structuring steps.

However, even in factories in which automatic systems manage the transfer of intermediate products between production lines unexpected failures or bottlenecks resulting from maintenance work require an interim storage of the substrates. As the storage period may be much longer than the planned transfer time between two manufacturing steps, the storage areas are thoroughly kept clean in order to prevent time-dependent micro-damages to the products.

Critical means of production, such as photomasks, which carry the structural information for the chips and have to be applicable for a long period without structural distortion. The are stored under high-purity environmental conditions, if they are not used in the exposure tools.

artemis control filter components are successfully used at the interface between clean room and interior of the storage units and they prevent the permeation of durably adhesive organic contaminants, bases and acids into the interior. The modular filter units are divided into specific functional layers which can be mutually independently changed depending on the pollution situation. Their application ensures that the air quality objectives which are defined by our customers based on internal specifications as well as international standards (ITRS 2010) are achieved.

AMC-filters for wafer and mask storing units are available for the current products. Special dimensions can be made available on request.

artemis control supports the analysis of the air quality in the storage areas as well as the initial operation of new units by means of qualifying measuring performances or permanently controlling AMC-monitors.